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微波等离子体炬 - COMSOL 中国 The simulation solves the coupled equations for plasma transport and heating, microwave electromagnetic fields, fluid flow, and heat transfer in a fully self-consistent manner
lt;br gt;使用 ANSYS Fluent 和 COMSOL Multiphysics 软件包 . . . This article is devoted to the comparison of calculations of plasma processes in a radio frequency (RF) inductively coupled plasma (ICP) torch in the ANSYS Fluent software package, which is traditionally used for such calculations, and in the COMSOL Multiphysics software package